This off-line instrument is a sheet resistance mapper for the automatic measurement of a stack of more than 100 wafers. The handling time is around 10 seconds, the supported wafer size is between 70 x 70 mm and 166 x 166 mm.
This compact instrument is motorized in all axes to create mappings of sheet resistance and wafer resistivity with 100 points in less than 4 minutes. Single points can be re-measured after navigating the probe head to the desired location with a click on the map.
