接触电阻率和薄层电阻 TLM-SCAN+

Detailed investigation of TLM contact resistance measurements on crystalline silicon solar cells

Abstract The transmission line method (TLM) is often used in characterizing the contact resistance of c-Si solar cells by cutting cells into strips parallel to the busbars. When applying this method to industrial solar cells, we found various problems that have not been sufficiently explained in prior work. In this paper, we investigate different factors that influence the accuracy of this measurement, using both simulation and experimental methods. The following factors are shown to influence the extracted contact resistivity and are investigated in this work: (1) strip width; (2) edge shunting; (3) current flow through the intermediate unprobed fingers; (4) non-uniform contact resistance; and (5) non-uniform sheet resistance. In cases where the contact resistivity values determined from the TLM measurements and simulations were found to be inaccurate, we introduce correction procedures and measurement guidelines that reduce error. For example, when strip width is a factor, the measurement error of a 30 mm sample is reduced from 95.5% to 4.5% using a correction procedure validated by simulation. Furthermore, the methods are also shown to be very effective when applied to industrial solar cells. TLM measurements have an important role to play in both cell R&D and factory quality control, and this work can serve as a guide towards more accurate contact resistivity measurements.

多功能太阳电池栅线接触电阻测试仪

晶体硅太阳能电池的表面金属欧姆接触的好坏通过接触电阻来反映。在太阳能电池电极优化中，接触电阻是需要考量的一个重要方面。接触电阻的大小不仅与接触的图形有关，还与扩散工艺及接触形成工艺有关。不同栅线图形的欧姆接触好坏可以通过接触电阻率的大小来反映。因此，通过对接触电阻率的研究计算可以反映扩散、电极制作和烧结等工艺中存在的问题。但现在的测量方法存在测量时间长、效率低、精度差等缺陷，而又同时缺少一种专门测量太阳能电池接触电阻的测试设备，因此不利于太阳能电池接触电阻测量在产线上的应用。本技术成果采用TLM法测量接触电阻，结合电机平台、摄像头及计算机控制等技术已基本能实现自动测量和结果分析计算等功能。

接触电阻率和薄层电阻 TLM-SCAN+ 接触电阻率和薄层电阻 TLM-SCAN+ 前金属化的接触电阻是对丝网印刷太阳能电池的总串联电阻的重要贡献。 具有合适测试结构的转移长度方法是将接触电阻与其他串联电阻效应分开的最佳方法。 然而，接触电阻可以在太阳能电池上显着变化，因此需要在成品太阳能电池上以空间分辨率测量它的方法。 TLM-SCAN产生太阳能电池的接触电阻率的映射，该太阳能电池用激光或切割锯切割成条纹。 右侧的映射显示了分辨率和可重复性，因为它显示了14次测量的相同条带。 接触电阻率测量仪 这款紧凑型仪器测量成品太阳能电池的接触电阻率，手指线电阻，手指宽度和手指高度，或者测试结构。 通过在所有轴上电动化，可以通过按一个按钮来创建所有这些方法的地图。 用于测量薄扩散层的薄层电阻和晶圆电阻率的四点探头，使得TLM-SCAN 成为一种低成本，快速，高质量的四点探针贴图仪。 使操作更简单的功能： 自动位置校正以获得最佳接触质量 盖子关闭时自动启动 自动采样编号 软件探头识别 精确的导航与欢乐棒和显微镜相机 通过点击图像来探测定位和重新测量单点 一个样品上多个TLM测试图案的批处理模式 序列模式通过按一个按钮来测量接触电阻率和手指几何图形的映射

接触电阻率和薄层电阻 TLM-SCAN+