Four-point-probe mapping with handling system
This off-line instrument is a sheet resistance mapper for the automatic measurement of a stack of more than 100 wafers. The handling time is around 10 seconds, the supported wafer size is between 70 x 70 mm and 166 x 166 mm.
This off-line instrument is a sheet resistance mapper for the automatic measurement of a stack of more than 100 wafers. The handling time is around 10 seconds, the supported wafer size is between 70 x 70 mm and 166 x 166 mm.
