Product Detail
The PH-ASE spectroscopic ellipsometer measures thickness, refractive index and extinction coefficient of single films and multilayer stacks. Reflection measurements at different incident angles and transmission measurements can be carried out and combined with ellipsometric data.
Product's Feature:
The spectroscopic ellipsometer is used for thin film and material characterization in R & D. The spectroscopic ellipsometer is designed to meet the requirements in modern research with special emphasis on speed and accuracy for an unmatched variety of applications.
■Automatic calibration and Measurement
■Measurement of thickness and refractive index of transparent films on absorbing or transparent substrates
■Analysis of amorphous and polysilicon films and SOI films
■Measurement of optical constants of photoresists
■Analysis of organic films
■Measurements of isotropic materials and films
■Eliminates the blind spot of the whole wavelength range
■Measured transparent and absorbing substrates
■Experimental data and simulated 3D graphics data
■Friendly interface, powerful data analysis
Technique Specification:
■Angle range: 20 ° to 90 ° automatic control ,5°/step
■Wavelength range :350-850nm, 250-1100nm, 190-2500nm: 0.002 ° ~ 0.02 °
■Wavelength accuracy: 1nm
■Measuring time: <8s
■Angle accuracy: 0.01
■Thickness range 0.01 nm - 50,000 nm
■Extinction ratio : 10-6
